{"id":81343,"date":"2024-09-04T08:13:44","date_gmt":"2024-09-04T08:13:44","guid":{"rendered":"https:\/\/science-hub.click\/%E3%83%98%E3%82%AD%E3%82%B5%E3%83%A1%E3%83%81%E3%83%AB%E3%82%B8%E3%82%B7%E3%83%AD%E3%82%AD%E3%82%B5%E3%83%B3%E3%81%AB%E3%81%A4%E3%81%84%E3%81%A6%E8%A9%B3%E3%81%97%E3%81%8F%E8%A7%A3%E8%AA%AC\/"},"modified":"2024-09-04T08:13:44","modified_gmt":"2024-09-04T08:13:44","slug":"%E3%83%98%E3%82%AD%E3%82%B5%E3%83%A1%E3%83%81%E3%83%AB%E3%82%B8%E3%82%B7%E3%83%AD%E3%82%AD%E3%82%B5%E3%83%B3%E3%81%AB%E3%81%A4%E3%81%84%E3%81%A6%E8%A9%B3%E3%81%97%E3%81%8F%E8%A7%A3%E8%AA%AC","status":"publish","type":"post","link":"https:\/\/science-hub.click\/?p=81343","title":{"rendered":"\u30d8\u30ad\u30b5\u30e1\u30c1\u30eb\u30b8\u30b7\u30ed\u30ad\u30b5\u30f3\u306b\u3064\u3044\u3066\u8a73\u3057\u304f\u89e3\u8aac"},"content":{"rendered":"

\u5c0e\u5165<\/h2>
\u30d8\u30ad\u30b5\u30e1\u30c1\u30eb\u30b8\u30b7\u30ed\u30ad\u30b5\u30f3<\/th><\/tr>
\n\"\u30d8\u30ad\u30b5\u30e1\u30c1\u30eb\u30b8\u30b7\u30ed\u30ad\u30b5\u30f3\"<\/figure><\/td><\/tr>
\u4e00\u822c\u7684\u306a<\/th><\/tr>
IUPAC\u540d<\/td><\/tr>
\u540c\u7fa9\u8a9e<\/td>HMDS HMDSO (TMS) 2O<\/sub>\u30d3\u30b9(\u30c8\u30ea\u30e1\u30c1\u30eb\u30b7\u30ea\u30eb)\u30a8\u30fc\u30c6\u30eb<\/td><\/tr>
CAS\u756a\u53f7<\/sup><\/td>107-46-0<\/span><\/span><\/td><\/tr>
No.RTECS<\/sup><\/td> JM9237000<\/span><\/td><\/tr>
\u30d1\u30d6\u30b1\u30e0<\/td>24764<\/span><\/td><\/tr>
\u7b11\u9854<\/td><\/tr>
\u30a4\u30f3\u30c1\u30c1<\/td><\/tr>
\u5916\u89b3<\/td>\u7121\u8272\u306e\u6db2\u4f53<\/a><\/span><\/td><\/tr>
\u5316\u5b66\u7684\u6027\u8cea<\/th><\/tr>
\u751f\u306e\u30d5\u30a9\u30fc\u30df\u30e5\u30e9<\/td>C6H18OSi2<\/sub>\u200b<\/sub>\u200b<\/sub><\/td><\/tr>
\u30e2\u30eb\u8cea\u91cf<\/a><\/span><\/td>162.3775 \u00b1 0.007 g mol -1<\/sup><\/td><\/tr>
\u7269\u7406\u7684\u6027\u8cea<\/th><\/tr>
\u878d\u89e3<\/a><\/span>\u6e29\u5ea6<\/td>\u221259<\/span> \u2103<\/abbr><\/td><\/tr>
\u6cb8\u9a30<\/a><\/span>\u6e29\u5ea6<\/td>101<\/span> \u2103<\/abbr><\/td><\/tr>
\u5bc6\u5ea6<\/a><\/span><\/td>0.76g<\/span>\u30fb<\/span>cm<\/span> -3<\/sup><\/span><\/td><\/tr>
\u98fd\u548c\u84b8\u6c17\u5727<\/a><\/span><\/td>20<\/span> \u2103<\/abbr>\u306720hPa<\/td><\/tr>
\u5149\u5b66\u7279\u6027<\/th><\/tr>
\u5c48\u6298\u7387<\/a><\/span><\/td>
$$ {\\textit{n}_{D}^{20}} $$<\/div> = 1.377<\/td><\/tr>
\u4e88\u9632<\/th><\/tr>
\u6307\u4ee4 67\/548\/EEC <\/center><\/td><\/tr>
\n\"\u5f15\u706b\u6027\u304c\u9ad8\u3044\"<\/figure> F<\/center><\/td><\/tr><\/table><\/td><\/tr>
R\u30d5\u30ec\u30fc\u30ba\uff1a 11\u3001<\/span><\/td><\/tr>
S\u30d5\u30ec\u30fc\u30ba\uff1a 16\u3001<\/span><\/td><\/tr>
\u7279\u306b\u6307\u5b9a\u306e<\/a><\/span>\u306a\u3044\u9650\u308a\u3001SI \u304a\u3088\u3073 CNTP \u5358\u4f4d\u3002<\/center><\/td><\/tr><\/table>

\u30d8\u30ad\u30b5\u30e1\u30c1\u30eb\u30b8\u30b7\u30ed\u30ad\u30b5\u30f3<\/b>\u307e\u305f\u306f HMDS \u306f\u3001\u534a\u69cb\u9020\u5f0f O[Si(CH 3<\/sub> ) 3<\/sub> ] 2<\/sub>\u3092\u6301\u3064\u6709\u6a5f\u5316\u5408\u7269<\/a><\/span>\u3067\u3059\u3002\u7121\u8272\u306e\u63ee\u767a\u6027\u6db2\u4f53\u3067\u3001\u6eb6\u5a92<\/a><\/span>\u3084\u8a66\u85ac\u3068\u3057\u3066\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002\u305d\u308c\u306f\u5869\u5316\u30c8\u30ea\u30e1\u30c1\u30eb\u30b7\u30ea\u30eb<\/a><\/span>\u306e\u52a0\u6c34\u5206\u89e3\u304b\u3089\u751f\u3058\u307e\u3059\u3002\u3053\u306e\u5206\u5b50\u306f<\/a><\/span>\u30b7\u30ea\u30eb\u30a8\u30fc\u30c6\u30eb\u306e\u539f\u578b\u3067\u3042\u308a\u3001\u30dd\u30ea\u30b8\u30e1\u30c1\u30eb\u30b7\u30ed\u30ad\u30b5\u30f3\u306e\u30b5\u30d6\u30e6\u30cb\u30c3\u30c8\u3068\u8003\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>

\n\"\u30d8\u30ad\u30b5\u30e1\u30c1\u30eb\u30b8\u30b7\u30ed\u30ad\u30b5\u30f3\u306b\u3064\u3044\u3066\u8a73\u3057\u304f\u89e3\u8aac\"<\/figure>

\u4f7f\u7528<\/h2>

\u30d8\u30ad\u30b5\u30e1\u30c1\u30eb\u30b8\u30b7\u30ed\u30ad\u30b5\u30f3\u306f\u3001\u6709\u6a5f<\/span>\u5408\u6210\u306b\u304a\u3044\u3066\u4e3b\u306b\u30c8\u30ea\u30e1\u30c1\u30eb\u30b7\u30ea\u30eb\u5b98\u80fd\u57fa<\/a><\/span>-Si(CH 3<\/sub> ) 3<\/sub>\u306e\u4f9b\u7d66\u6e90\u3068\u3057\u3066\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002\u305f\u3068\u3048\u3070\u3001\u9178<\/a><\/span>\u89e6\u5a92\u4f5c\u7528<\/a><\/span>\u306b\u3088\u308a\u3001\u30a2\u30eb\u30b3\u30fc\u30eb\u3068\u30ab\u30eb\u30dc\u30f3\u9178\u3092\u5bfe\u5fdc\u3059\u308b\u30c8\u30ea\u30e1\u30c1\u30eb\u30b7\u30ea\u30eb\u30a8\u30fc\u30c6\u30eb\u3068\u30a8\u30b9\u30c6\u30eb<\/a><\/span>\u306b\u5909\u63db\u3057\u307e\u3059\u3002<\/p>

HMDS \u306f\u3001 1<\/sup> H NMR \u5206\u5149\u6cd5\u3067\u5316\u5b66\u30b7\u30d5\u30c8\u3092\u6821\u6b63\u3059\u308b\u305f\u3081\u306e\u5185\u90e8<\/a><\/span>\u6a19\u6e96\u3068\u3057\u3066\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002HMDS \u306f\u3001\u901a\u5e38\u306e\u6a19\u6e96\u3067\u3042\u308b\u30c6\u30c8\u30e9\u30e1\u30c1\u30eb\u30b7\u30e9\u30f3\u3088\u308a\u3082\u63ee\u767a\u6027\u304c\u4f4e\u304f\u3001 0<\/span> ppm<\/span><\/span>\u306b\u8fd1\u3044\u4e00\u91cd\u9805\u306e\u307f\u3092\u8868\u793a\u3059\u308b\u305f\u3081\u3001\u53d6\u308a\u6271\u3044\u304c\u5bb9\u6613\u3067\u3059\u3002<\/p>

HMDS \u306e\u6eb6\u5a92\u548c\u529b\u306f\u30a2\u30eb\u30ab\u30f3\u3088\u308a\u3082\u3055\u3089\u306b\u4f4e\u304f\u306a\u308a\u307e\u3059\u3002\u3057\u305f\u304c\u3063\u3066\u3001\u975e\u5e38\u306b\u89aa\u6cb9\u6027\u306e\u9ad8\u3044\u5316\u5408\u7269\u3092\u7d50\u6676\u5316\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002<\/p>

\u85ac\u5c40<\/a><\/span>\u3067\u306f\u3001\u4ed6\u306e\u4f53\u6db2\u306b\u3088\u308b\u523a\u6fc0\u304b\u3089\u76ae\u819a<\/a><\/span>\u306e\u640d\u50b7\u9818\u57df\u3092\u4fdd\u8b77\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u308b\u30ad\u30e3\u30d3\u30ed\u30f3\u30b9\u30d7\u30ec\u30fc\u306a\u3069\u306e\u6db2\u4f53\u5305\u5e2f<\/span>\u306b\u3082\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u773c\u79d1<\/a><\/span>\u3067\u306f\u3001\u30b8\u30e1\u30c1\u30b3\u30f3\u306f\u4fdd\u8b77\u304a\u3088\u3073\u6f64\u6ed1\u70b9\u773c\u85ac<\/a><\/span>\u3067\u3042\u308a\u3001\u80c3\u79d1\u3067\u306f\u80c3\u5305\u5e2f<\/a><\/span>\u3068\u3057\u3066\u4f7f\u7528\u3055\u308c\u3001\u30b7\u30e1\u30c1\u30b3\u30f3\u3068\u3044\u3046\u540d\u524d\u3067\u30b7\u30ea\u30ab<\/a><\/span>\u3068\u7d44\u307f\u5408\u308f\u305b\u3089\u308c\u308b\u3053\u3068\u3082\u3042\u308a\u307e\u3059<\/span>\u3002<\/p>

\u6700\u8fd1\u3067\u306f\u3001\u30b7\u30e9\u30df\u75c7<\/a><\/span>\u306e\u6cbb\u7642\u306b\u4f7f\u7528\u3055\u308c\u3066\u304a\u308a\u3001\u6bba\u866b\u5264\u3084\u795e\u7d4c\u6bd2\u6027\u88fd\u54c1\u306e\u982d\u90e8\u3078\u306e\u76f4\u63a5\u9069\u7528\u3067\u767a\u751f\u3057\u305f\u9078\u629e\u306b\u3088\u308b\u8010\u6027\u306e\u554f\u984c\u3092\u89e3\u6c7a\u3057\u307e\u3059\u3002\u7c98\u5ea6<\/a><\/span>\u8abf\u6574<\/span>\u5264\u3068\u3057\u3066\u6eb6\u5a92\u3067\u3042\u308b\u30b7\u30af\u30ed\u30e1\u30c1\u30b3\u30f3\u3068\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>

\u534a\u5c0e\u4f53\u696d\u754c\u3067\u306f\u3001PECVD (\u30d7\u30e9\u30ba\u30de\u652f\u63f4\u5316\u5b66\u84b8\u7740<\/a><\/span>) \u306b\u3088\u308b\u4f4e\u8a98\u96fb\u7387<\/a><\/span>\u8a98\u96fb\u4f53\u6750\u6599<\/a><\/span>\u306e\u88fd\u9020\u306b\u304a\u3044\u3066 HMDS \u304c\u7814\u7a76\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>

\u5b89\u5168<\/h2>

\u307b\u3068\u3093\u3069\u306e\u30b7\u30ed\u30ad\u30b5\u30f3\u3068\u540c\u69d8\u3001\u30d8\u30ad\u30b5\u30e1\u30c1\u30eb\u30b8\u30b7\u30ed\u30ad\u30b5\u30f3\u306f\u4e8b\u5b9f\u4e0a\u7121\u5bb3\u3067\u3059\u3002\u4eba\u4f53\u306b\u5bb3\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p><\/div>

\u53c2\u8003\u8cc7\u6599<\/h2>
  1. \u0647\u0642\u0632\u0627\u0645\u062a\u06cc\u0644\u200c\u062f\u06cc\u200c\u0633\u06cc\u0644\u0648\u06a9\u0633\u0627\u0646 \u2013 South Azerbaijani<\/a><\/li>
  2. Hexamethyldisiloxan \u2013 allemand<\/a><\/li>
  3. Hexamethyldisiloxane \u2013 anglais<\/a><\/li>
  4. \u0647\u06af\u0632\u0627\u0645\u062a\u06cc\u0644\u200c\u062f\u06cc\u200c\u0633\u06cc\u0644\u0648\u06a9\u0633\u0627\u0646 \u2013 persan<\/a><\/li>
  5. Heksametyylidisiloksaani \u2013 finnois<\/a><\/li>
  6. Esametildisilossano \u2013 italien<\/a><\/li><\/ol><\/div>\n
    \n

    \n \u30d8\u30ad\u30b5\u30e1\u30c1\u30eb\u30b8\u30b7\u30ed\u30ad\u30b5\u30f3\u306b\u3064\u3044\u3066\u8a73\u3057\u304f\u89e3\u8aac\u30fb\u95a2\u9023\u52d5\u753b\n <\/h2>\n
    \n \n
    \n
    \n